WF6 feem ntau yog siv los ua cov khoom siv raw rau cov tshuaj vapor deposition (CVD) txheej txheem ntawm hlau tungsten hauv kev lag luam hluav taws xob. WSi2 ua los ntawm WF6 tuaj yeem siv los ua cov khoom siv hluav taws xob hauv cov hluav taws xob loj sib xyaw ua ke (LSI), thiab tseem tuaj yeem siv los ua cov khoom siv raw rau cov khoom siv hluav taws xob semiconductor, fluorine Raw cov ntaub ntawv rau tshuaj tua kab mob, polymerization catalysts, cov khoom siv kho qhov muag, thiab lwm yam.